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IDA MODULES:


Automation Workbench


Intelligent Reporting System


Defect Signature Navigator™


Real_Time Process Monitor ™

Defect Signature Analyzer (DSA™) Module
Defect Signature Analyzer provides the yield engineer with a wide range of analysis and visualization tools with which to develop and optimize the defect signature analysis methodology and to train the defect signature library.

Benefit - Provide effective way to build a defect signature/root-cause library.

 

 

DSA Data Sheet