IDA Professional

IDA Professional Edition provides the semiconductor fab with a state-of-the-art capability to analyze defect inspection data for spatial signatures in a production environment. The modules that comprise IDA Professional are all desktop applications, which may be installed on a Windows-based server or PC. Signature analysis recipes analyze inspection data in real time, notifying fab personnel when a signature is detected. Recipes may also write analysis results to an Access data repository (mdb file), which may be used for trend analysis and reporting.

	Defect Signature Analyzer (DSA™) provides the yield engineer with a wide range of analysis and visualization tools with which to develop and optimize the defect signature analysis methodology and to train the defect signature libraries.
	Automation Workbench (AWB™) that allows the engineer to automate the signature analysis methodology to run in either batch mode or continuous monitor mode. An easy-to-use graphical interface allows the user to develop custom analysis recipes that enhance signature recognition accuracy and purity.
	Intelligent Reporting System (IRS™) allows the user to process and compile the signature analysis results in that are generated by the AWB recipes. The user may view, analyze and report on the multi-dimensional process variables that are contained in the IDA data repository files.
	AWB Monitor (MON™) allows the user to launch and monitor multiple AWB recipes using a single monitor job. AWB Monitor allows the user to conveniently select any of the AWB recipes running in the job and to display the current status of that recipe.