IDA Enterprise Edition

IDA Enterprise Edition provides the semiconductor fab with a state-of-the-art capability to analyze defect inspection data for spatial signatures in a production environment and to make the results of the analyses available to clients throughout the fab. IDA Enterprise also supports an extensive SQL data base to support long term trend analysis of signature data. The IDA Server modules provide the full range of IDA application services and data services to client PCs, providing the user interface for the full range of IDA functions. In addition to providing the same signature analysis capability as IDA Professional, IDA Enterprise clients have real-time access to signature analysis results in the IDA data base.

	Defect Signature Analyzer (DSA™) provides the yield engineer with a wide range of analysis and visualization tools with which to develop and optimize the defect signature analysis methodology and to train the defect signature libraries.
	Automation Workbench (AWB™) that allows the engineer to automate the signature analysis methodology to run in either batch mode or continuous monitor mode. An easy-to-use graphical interface allows the user to develop custom analysis recipes that enhance signature recognition accuracy and purity.
	AWB Monitor (MON™) allows the user to launch and monitor multiple AWB recipes using a single monitor job. AWB Monitor allows the user to conveniently select any of the AWB recipes running in the job and to display the current status of that recipe.